Features and advantages
The micro/nano scale focal spot size ensures the high resolution of the system
Transmission type ray source, with a small distance between the test sample and the focal point, achieving high-resolution imaging
Multiple scanning modes: spiral, offset, limited angle, etc
Can be equipped with an automatic sampling system for batch automated testing
Technical indicators
resolving power
| Pixel detail resolution | 200nm(Flat panel detector) / 40nm(Objective coupled detector) |
| Spatial resolution* | 500nm(Flat panel detector) / 500nm(Objective coupled detector) |
| X-ray source | |
| type | Open tube transmission (microfocal/nanofocal) |
| Maximum voltage | 240KV / 225KV / 190KV / 160KV |
| Flat panel detector | |
| Imaging area | 244mm×195mm |
| Pixel matrix | 1920×1536 |
| Objective coupled detector | |
| lens | 4X、10X、20X |
| Samples | |
| Detectable sample size | 450mm×350mm(diameter × Height) |
| Sample bearing capacity | 15kg |
| Equipment physical parameters | |
| Equipment size | 2460mm×1250mm×1950mm(Long × wide × High) |
| Equipment weight | 5000kg |
| *Spatial resolution can be tested and verified using a spatial resolution test card | |
